Publication:
MEMS rotary stage with linear stiffness

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dc.contributor.coauthorN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorBrown, Dean
dc.contributor.kuauthorDavis, Wyatt O.
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:57:43Z
dc.date.issued2011
dc.description.abstractA comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate +/- 7deg. and +/- 4.5deg at vacuum and ambient pressure, respectively.
dc.description.indexedbyWOS
dc.description.openaccessNO
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.isbn978-1-4577-0336-2
dc.identifier.scopus2-s2.0-82955193736
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7587
dc.identifier.wos297850100015
dc.keywordsComponent
dc.keywordsComb drive
dc.keywordsLinear MEMS scanner
dc.keywordsLow-frequency scanning
dc.keywordsMicroscanner
dc.language.isoeng
dc.publisherIeee
dc.relation.ispartofOmn2011: 16th International Conference On Optical Mems And Nanophotonics
dc.subjectEngineering
dc.subjectElectrical and electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.titleMEMS rotary stage with linear stiffness
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorDavis, Wyatt O.
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorBrown, Dean
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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