Publication:
MEMS rotary stage with linear stiffness

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dc.contributor.coauthorN/A
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorDavis, Wyatt O.
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorBrown, Dean
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileOther
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileOther
dc.contributor.kuprofileOther
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileFaculty Member
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T22:57:43Z
dc.date.issued2011
dc.description.abstractA comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate +/- 7deg. and +/- 4.5deg at vacuum and ambient pressure, respectively.
dc.description.indexedbyWoS
dc.description.openaccessNO
dc.identifier.doiN/A
dc.identifier.isbn978-1-4577-0336-2
dc.identifier.scopus2-s2.0-82955193736
dc.identifier.uriN/A
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7587
dc.identifier.wos297850100015
dc.keywordsComponent
dc.keywordsComb drive
dc.keywordsLinear MEMS scanner
dc.keywordsLow-frequency scanning
dc.keywordsMicroscanner
dc.languageEnglish
dc.publisherIeee
dc.sourceOmn2011: 16th International Conference On Optical Mems And Nanophotonics
dc.subjectEngineering
dc.subjectElectrical and electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.titleMEMS rotary stage with linear stiffness
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-7740-4252
local.contributor.authoridN/A
local.contributor.authorid0000-0003-3578-0206
local.contributor.authoridN/A
local.contributor.authorid0000-0001-5166-0015
local.contributor.authorid0000-0001-9220-776X
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorDavis, Wyatt O.
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorBrown, Dean
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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