Publication: MEMS rotary stage with linear stiffness
Program
KU Authors
Co-Authors
N/A
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate +/- 7deg. and +/- 4.5deg at vacuum and ambient pressure, respectively.
Description
Source:
Omn2011: 16th International Conference On Optical Mems And Nanophotonics
Publisher:
Ieee
Keywords:
Subject
Engineering, Electrical and electronic engineering, Nanoscience, Nanotechnology