Publication: MEMS rotary stage with linear stiffness
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Abstract
A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate +/- 7deg. and +/- 4.5deg at vacuum and ambient pressure, respectively.
Source
Publisher
Ieee
Subject
Engineering, Electrical and electronic engineering, Nanoscience, Nanotechnology
Citation
Has Part
Source
Omn2011: 16th International Conference On Optical Mems And Nanophotonics