Publication:
Dynamic analysis of a torsional mems scanner mirror, part 1: disturbance analysis framework

dc.contributor.coauthorN/A
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorBaşdoğan, İpek
dc.contributor.kuauthorMeral, Faik Can
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:21:34Z
dc.date.issued2005
dc.description.abstractFuture optical micro systems such as Micro Electro Mechanical Systems (MEMS) scanners and micro-mirrors will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (modeshapes), are used to obtain the state space representation of the mirror. The state space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all of the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square (RMS) values of the mirror rotation angle under the effect of a disturbance torque. The Lyapunov approach results were validated using a time domain analysis.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1115/DETC2005-85225
dc.identifier.isbn0-7918-4738-1
dc.identifier.scopus2-s2.0-33144487851
dc.identifier.urihttps://doi.org/10.1115/DETC2005-85225
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10912
dc.identifier.wos243093200061
dc.language.isoeng
dc.publisherAmer Soc Mechanical Engineers
dc.relation.ispartofProceedings of the Asme International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Vol 1, Pts A-C
dc.subjectAutomation
dc.subjectControl systems
dc.subjectEngineering
dc.subjectManufacturing engineering
dc.titleDynamic analysis of a torsional mems scanner mirror, part 1: disturbance analysis framework
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorMeral, Faik Can
local.contributor.kuauthorBaşdoğan, İpek
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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