Publication: Two-dimensional mems stage integrated with microlens arrays for laser beam steering
Program
KU Authors
Co-Authors
Hibert, Cyrille
Bowman, David
Publication Date
Language
Type
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Source
Publisher
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Instruments, Instrumentation, Physics, Applied physics
Citation
Has Part
Source
Journal of Microelectromechanical Systems
Book Series Title
Edition
DOI
10.1109/JMEMS.2010.2090507