Publication: Two-dimensional mems stage integrated with microlens arrays for laser beam steering
Program
KU Authors
Co-Authors
Hibert, Cyrille
Bowman, David
Advisor
Publication Date
2011
Language
English
Type
Journal Article
Journal Title
Journal ISSN
Volume Title
Abstract
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Description
Source:
Journal of Microelectromechanical Systems
Publisher:
Keywords:
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Instruments, Instrumentation, Physics, Applied physics