Publication: Two-dimensional mems stage integrated with microlens arrays for laser beam steering
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Hibert, Cyrille
Bowman, David
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Abstract
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
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Journal of Microelectromechanical Systems
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DOI
10.1109/JMEMS.2010.2090507
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