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Two-dimensional mems stage integrated with microlens arrays for laser beam steering

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dc.contributor.coauthorHibert, Cyrille
dc.contributor.coauthorBowman, David
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentOptical Microsystems Laboratory (MEMS)
dc.contributor.facultymemberYes
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÖlçer, Selim
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteLaboratory
dc.date.accessioned2024-11-09T22:50:01Z
dc.date.issued2011
dc.description.abstractA novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsorshipThis work was supported by The Scientific and Technological Research Council of Turkey (TUBITAK) under Grant 106E068
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileQ2
dc.identifier.doi10.1109/JMEMS.2010.2090507
dc.identifier.embargoN/A
dc.identifier.endpage17
dc.identifier.grantno106E068
dc.identifier.issn1057-7157
dc.identifier.issue1
dc.identifier.scopus2-s2.0-79551607626
dc.identifier.startpage15
dc.identifier.urihttps://doi.org/10.1109/JMEMS.2010.2090507
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6586
dc.identifier.volume20
dc.identifier.wos000286934900004
dc.keywordsEngineering
dc.language.isoeng
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartofJournal of Microelectromechanical Systems
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectInstruments
dc.subjectInstrumentation
dc.subjectPhysics
dc.subjectApplied physics
dc.titleTwo-dimensional mems stage integrated with microlens arrays for laser beam steering
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorÖlçer, Selim
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication1ccc49b6-9307-426d-a69c-e129234ffef8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication20385dee-35e7-484b-8da6-ddcc08271d96
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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