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Two-dimensional mems stage integrated with microlens arrays for laser beam steering

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dc.contributor.coauthorHibert, Cyrille
dc.contributor.coauthorBowman, David
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÖlçer, Selim
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T22:50:01Z
dc.date.issued2011
dc.description.abstractA novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.issue1
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume20
dc.identifier.doi10.1109/JMEMS.2010.2090507
dc.identifier.issn1057-7157
dc.identifier.quartileQ3
dc.identifier.scopus2-s2.0-79551607626
dc.identifier.urihttps://doi.org/10.1109/JMEMS.2010.2090507
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6586
dc.identifier.wos286934900004
dc.keywordsEngineering
dc.language.isoeng
dc.relation.ispartofJournal of Microelectromechanical Systems
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectInstruments
dc.subjectInstrumentation
dc.subjectPhysics, Applied physics
dc.titleTwo-dimensional mems stage integrated with microlens arrays for laser beam steering
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorÖlçer, Selim
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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