Publication:
MEMS rotary stage with linear stiffness

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorDavis, Wyatt O.
dc.contributor.kuauthorBrown, Dean
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileOther
dc.contributor.kuprofileN/A
dc.contributor.kuprofileN/A
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:27:22Z
dc.date.issued2011
dc.description.abstractA comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.
dc.description.indexedbyScopus
dc.description.indexedbyWoS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsorshipMicrovision, Seattle, USA.
dc.identifier.doi10.1109/OMEMS.2011.6031053
dc.identifier.isbn9781-4577-0336-2
dc.identifier.issn2160-5033
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-82955193736&doi=10.1109%2fOMEMS.2011.6031053&partnerID=40&md5=8a5fec84f42166f542c7b541cc74e01f
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-82955193736
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2011.6031053
dc.identifier.urihttps://hdl.handle.net/20.500.14288/11705
dc.identifier.wos297850100015
dc.keywordsComb Drive
dc.keywordsLinear MEMS Scanner
dc.keywordsLow-frequency scanning ambient pressures
dc.keywordsAt resonance
dc.keywordsComb drive
dc.keywordsLinear MEMS Scanner
dc.keywordsLinear spring
dc.keywordsLinear stiffness
dc.keywordsLow frequency
dc.keywordsMEMS stage
dc.keywordsPresent stage
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsStiffness
dc.languageEnglish
dc.publisherIEEE
dc.sourceInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleMEMS rotary stage with linear stiffness
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authoridN/A
local.contributor.authorid0000-0003-3578-0206
local.contributor.authorid0000-0002-7740-4252
local.contributor.authoridN/A
local.contributor.authoridN/A
local.contributor.authoridN/A
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorDavis, Wyatt O.
local.contributor.kuauthorBrown, Dean
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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