Publication:
MEMS rotary stage with linear stiffness

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Publication Date

2011

Language

English

Type

Conference proceeding

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Abstract

A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.

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Source:

International Conference on Optical MEMS and Nanophotonics

Publisher:

IEEE

Keywords:

Subject

Electrical electronics engineering

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