Publication: MEMS rotary stage with linear stiffness
Program
KU Authors
Co-Authors
Advisor
Publication Date
2011
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.
Description
Source:
International Conference on Optical MEMS and Nanophotonics
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering