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MEMS rotary stage with linear stiffness

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A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.

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IEEE

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Electrical electronics engineering

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International Conference on Optical MEMS and Nanophotonics

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10.1109/OMEMS.2011.6031053

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