Publication: MEMS rotary stage with linear stiffness
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Abstract
A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.
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IEEE
Subject
Electrical electronics engineering
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International Conference on Optical MEMS and Nanophotonics
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10.1109/OMEMS.2011.6031053
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