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Publication:
MEMS rotary stage with linear stiffness

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Date

2011

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Conference Proceeding

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Abstract

A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.

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IEEE

Subject

Electrical electronics engineering

Citation

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Source

International Conference on Optical MEMS and Nanophotonics

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DOI

10.1109/OMEMS.2011.6031053

URI

https://doi.org/10.1109/OMEMS.2011.6031053
 https://hdl.handle.net/20.500.14288/11705

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Item type:Goal, Access status: Open Access ,
07 - Affordable and Clean Energy
Renewable energy solutions are becoming cheaper, more reliable and more efficient every day.Our current reliance on fossil fuels is unsustainable and harmful to the planet, which is why we have to change the way we produce and consume energy. Implementing these new energy solutions as fast as possible is essential to counter climate change, one of the biggest threats to our own survival.
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