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Linear-stiffness rotary MEMS stage

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dc.contributor.coauthorDavis, Wyatt O.
dc.contributor.coauthorBrown, Dean
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:53:36Z
dc.date.issued2012
dc.description.abstractA novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to +/- 7 degrees mechanical scan angle is achievable with the new suspension design. [2011-0292]
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.issue3
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume21
dc.identifier.doi10.1109/JMEMS.2011.2182504
dc.identifier.issn1057-7157
dc.identifier.scopus2-s2.0-84863396037
dc.identifier.urihttps://doi.org/10.1109/JMEMS.2011.2182504
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7224
dc.identifier.wos304904400003
dc.keywordsComb drive
dc.keywordsLinear spring
dc.keywordsLow-frequency laser beam scanning
dc.keywordsMicroelectromechanical systems (MEMS) stage
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofJournal of Microelectromechanical Systems
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectInstruments
dc.subjectInstrumentation
dc.subjectPhysics
dc.subjectApplied physics
dc.titleLinear-stiffness rotary MEMS stage
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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