Publication:
Linear-stiffness rotary MEMS stage

Simple item page
dc.contributor.coauthorDavis, Wyatt O.
dc.contributor.coauthorBrown, Dean
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentOptical Microsystems Laboratory (MEMS)
dc.contributor.facultymemberYes
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteLaboratory
dc.date.accessioned2024-11-09T22:53:36Z
dc.date.issued2012
dc.description.abstractA novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to +/- 7 degrees mechanical scan angle is achievable with the new suspension design.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileQ2
dc.identifier.doi10.1109/JMEMS.2011.2182504
dc.identifier.embargoN/A
dc.identifier.endpage516
dc.identifier.issn1057-7157
dc.identifier.issue3
dc.identifier.scopus2-s2.0-84863396037
dc.identifier.startpage514
dc.identifier.urihttps://doi.org/10.1109/JMEMS.2011.2182504
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7224
dc.identifier.volume21
dc.identifier.wos000304904400003
dc.keywordsComb drive
dc.keywordsLinear spring
dc.keywordsLow-frequency laser beam scanning
dc.keywordsMicroelectromechanical systems (MEMS) stage
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartofJournal of Microelectromechanical Systems
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectInstruments
dc.subjectInstrumentation
dc.subjectPhysics
dc.subjectApplied physics
dc.titleLinear-stiffness rotary MEMS stage
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication1ccc49b6-9307-426d-a69c-e129234ffef8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication20385dee-35e7-484b-8da6-ddcc08271d96
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

Files

Collections

Publications without Fulltext