Publication: Linear-stiffness rotary MEMS stage
Program
KU Authors
Co-Authors
Davis, Wyatt O.
Brown, Dean
Advisor
Publication Date
2012
Language
English
Type
Journal Article
Journal Title
Journal ISSN
Volume Title
Abstract
A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to +/- 7 degrees mechanical scan angle is achievable with the new suspension design. [2011-0292]
Description
Source:
Journal of Microelectromechanical Systems
Publisher:
IEEE-Inst Electrical Electronics Engineers Inc
Keywords:
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Instruments, Instrumentation, Physics, Applied physics