Publication: Linear-stiffness rotary MEMS stage
Program
KU Authors
Co-Authors
Davis, Wyatt O.
Brown, Dean
Editor & Affiliation
Compiler & Affiliation
Translator
Other Contributor
Date
Language
Type
Embargo Status
N/A
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to +/- 7 degrees mechanical scan angle is achievable with the new suspension design. [2011-0292]
Source
Publisher
IEEE-Inst Electrical Electronics Engineers Inc
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Instruments, Instrumentation, Physics, Applied physics
Citation
Has Part
Source
Journal of Microelectromechanical Systems
Book Series Title
Edition
DOI
10.1109/JMEMS.2011.2182504
item.page.datauri
Link
Rights
N/A