Publication:
Design and integration of a bimorph thermal microactuator with electrostatically actuated microtweezers

Placeholder

School / College / Institute

Organizational Unit

Program

KU Authors

Co-Authors

Yilmaz, Mehmet
Yalcinkaya, Arda D.
Leblebici, Yusuf
Zervas, Michalis

Publication Date

Language

Embargo Status

Journal Title

Journal ISSN

Volume Title

Alternative Title

Abstract

A multi-digit gripper is proposed that consists of two electrostatically actuated end-effectors operating in the plane of the device and three thermal end-effectors operating out of plane. The integration of thermal and electrostatic actuation mechanisms is realized by using a three-mask monolithic process. First mask is used to define the silicon electrostatic actuator on SOI wafer. Second mask is used to obtain the bimorph thermal microactuator made of polyimide and aluminum layers on top of the electrostatic actuator. Third and the final mask is used to release the integrated electrostatic and thermal microactuators.

Source

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Computer Science, Hardware, Architecture, Engineering, Electrical, Electronic, Telecommunications

Citation

Has Part

Source

Prime: 2008 Phd Research in Microelectronics and Electronics
Proceedings

Book Series Title

Edition

DOI

10.1109/RME.2008.4595741

item.page.datauri

Link

Rights

Copyrights Note

Endorsement

Review

Supplemented By

Referenced By

0

Views

0

Downloads

View PlumX Details