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Design and integration of a bimorph thermal microactuator with electrostatically actuated microtweezers

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dc.contributor.coauthorYilmaz, Mehmet
dc.contributor.coauthorYalcinkaya, Arda D.
dc.contributor.coauthorLeblebici, Yusuf
dc.contributor.coauthorZervas, Michalis
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentKUYTAM (Koç University Surface Science and Technology Center)
dc.contributor.kuauthorAlaca, Burhanettin Erdem
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteResearch Center
dc.date.accessioned2024-11-09T23:51:22Z
dc.date.issued2008
dc.description.abstractA multi-digit gripper is proposed that consists of two electrostatically actuated end-effectors operating in the plane of the device and three thermal end-effectors operating out of plane. The integration of thermal and electrostatic actuation mechanisms is realized by using a three-mask monolithic process. First mask is used to define the silicon electrostatic actuator on SOI wafer. Second mask is used to obtain the bimorph thermal microactuator made of polyimide and aluminum layers on top of the electrostatic actuator. Third and the final mask is used to release the integrated electrostatic and thermal microactuators.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipTUBITAK[104 M216] This study is supported in part by TUBITAKunder grant No.104 M216. M. Yilmaz thanks to TUBITAKbecause of their pecuniary support and J. Craig from HD Microsystems. C. Ataman is acknowledged for his help in the test of the devices. We thank Prof. P. Boggild of DTU for valuable discussions in the initial phase of the project.
dc.identifier.doi10.1109/RME.2008.4595741
dc.identifier.isbn978-1-4244-1983-8
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-51849090500
dc.identifier.urihttps://doi.org/10.1109/RME.2008.4595741
dc.identifier.urihttps://hdl.handle.net/20.500.14288/14686
dc.identifier.wos259117000032
dc.keywordsBimorph thermal
dc.keywordsMicroactuator
dc.keywordsElectrostatically actuated microtweezers
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.ispartofPrime: 2008 Phd Research in Microelectronics and Electronics
dc.relation.ispartofProceedings
dc.subjectComputer Science
dc.subjectHardware
dc.subjectArchitecture
dc.subjectEngineering
dc.subjectElectrical
dc.subjectElectronic
dc.subjectTelecommunications
dc.titleDesign and integration of a bimorph thermal microactuator with electrostatically actuated microtweezers
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorAlaca, Burhanettin Erdem
local.publication.orgunit1College of Engineering
local.publication.orgunit1Research Center
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2KUYTAM (Koç University Surface Science and Technology Center)
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