Publication:
Optical characterization of micro and nanomechanical systems in two dimensions

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dc.conference.dateSEP 07-10, 2008
dc.conference.locationDresden, Germany
dc.conference.organizer22nd Eurosensors Conference
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:57:50Z
dc.date.issued2009
dc.description.abstractA simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of M EMS and NEMS devices. The setup has 100 pm/root Hz in-plane measurement resolution for I mu m full-width-half-maximum spot size illumination and 4 pm/root Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileQ1
dc.identifier.doi10.1016/j.sna.2009.02.014
dc.identifier.embargoN/A
dc.identifier.endpage221
dc.identifier.issn0924-4247
dc.identifier.issue1
dc.identifier.scopus2-s2.0-71649093905
dc.identifier.startpage217
dc.identifier.urihttps://doi.org/10.1016/j.sna.2009.02.014
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15363
dc.identifier.volume156
dc.identifier.wos000272636100032
dc.keywordsMicro/nanomechanical displacement detection
dc.keywordsKnife-edge technique
dc.keywordsInterferometry
dc.language.isoeng
dc.publisherElsevier
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartofSensors and Actuators A-Physical
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectElectrical electronics engineering
dc.subjectPhysical instruments
dc.titleOptical characterization of micro and nanomechanical systems in two dimensions
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorÜrey, Hakan
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