Publication:
Optical characterization of micro and nanomechanical systems in two dimensions

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileFaculty Member
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T23:57:50Z
dc.date.issued2009
dc.description.abstractA simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of M EMS and NEMS devices. The setup has 100 pm/root Hz in-plane measurement resolution for I mu m full-width-half-maximum spot size illumination and 4 pm/root Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.issue1
dc.description.openaccessNO
dc.description.volume156
dc.identifier.doi10.1016/j.sna.2009.02.014
dc.identifier.issn0924-4247
dc.identifier.scopus2-s2.0-71649093905
dc.identifier.urihttp://dx.doi.org/10.1016/j.sna.2009.02.014
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15363
dc.identifier.wos272636100032
dc.keywordsMicro/nanomechanical displacement detection
dc.keywordsKnife-edge technique
dc.keywordsInterferometry
dc.languageEnglish
dc.publisherElsevier Science Sa
dc.sourceSensors and Actuators A-Physical
dc.subjectElectrical electronics engineering
dc.subjectPhysical instruments
dc.titleOptical characterization of micro and nanomechanical systems in two dimensions
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0003-1100-8369
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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