Publication: Optical characterization of micro and nanomechanical systems in two dimensions
| dc.contributor.department | Department of Electrical and Electronics Engineering | |
| dc.contributor.kuauthor | Seren, Hüseyin Rahmi | |
| dc.contributor.kuauthor | Ürey, Hakan | |
| dc.contributor.kuprofile | Master Student | |
| dc.contributor.kuprofile | Faculty Member | |
| dc.contributor.yokid | N/A | |
| dc.contributor.yokid | 8579 | |
| dc.date.accessioned | 2024-11-09T23:57:50Z | |
| dc.date.issued | 2009 | |
| dc.description.abstract | A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of M EMS and NEMS devices. The setup has 100 pm/root Hz in-plane measurement resolution for I mu m full-width-half-maximum spot size illumination and 4 pm/root Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases. | |
| dc.description.indexedby | WoS | |
| dc.description.indexedby | Scopus | |
| dc.description.issue | 1 | |
| dc.description.openaccess | NO | |
| dc.description.volume | 156 | |
| dc.identifier.doi | 10.1016/j.sna.2009.02.014 | |
| dc.identifier.issn | 0924-4247 | |
| dc.identifier.scopus | 2-s2.0-71649093905 | |
| dc.identifier.uri | http://dx.doi.org/10.1016/j.sna.2009.02.014 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.14288/15363 | |
| dc.identifier.wos | 272636100032 | |
| dc.keywords | Micro/nanomechanical displacement detection | |
| dc.keywords | Knife-edge technique | |
| dc.keywords | Interferometry | |
| dc.language | English | |
| dc.publisher | Elsevier Science Sa | |
| dc.source | Sensors and Actuators A-Physical | |
| dc.subject | Electrical electronics engineering | |
| dc.subject | Physical instruments | |
| dc.title | Optical characterization of micro and nanomechanical systems in two dimensions | |
| dc.type | Conference proceeding | |
| dspace.entity.type | Publication | |
| local.contributor.authorid | 0000-0003-1100-8369 | |
| local.contributor.authorid | 0000-0002-2031-7967 | |
| local.contributor.kuauthor | Seren, Hüseyin Rahmi | |
| local.contributor.kuauthor | Ürey, Hakan | |
| local.publication.orgunit1 | Graduate School of Sciences and Engineering | |
| local.publication.orgunit1 | College of Engineering | |
| local.publication.orgunit2 | Department of Electrical and Electronics Engineering | |
| relation.isOrgUnitOfPublication | 21598063-a7c5-420d-91ba-0cc9b2db0ea0 | |
| relation.isOrgUnitOfPublication.latestForDiscovery | 21598063-a7c5-420d-91ba-0cc9b2db0ea0 |