Publication: Optical characterization of micro and nanomechanical systems in two dimensions
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Abstract
A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of M EMS and NEMS devices. The setup has 100 pm/root Hz in-plane measurement resolution for I mu m full-width-half-maximum spot size illumination and 4 pm/root Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.
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Elsevier
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Sensors and Actuators A-Physical
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10.1016/j.sna.2009.02.014
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