Publication:
Lamellar-grating-based mems fourier transform spectrometer

dc.contributor.coauthorSeren, Hüseyin R.
dc.contributor.coauthorSharma, Jaibir
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:52:22Z
dc.date.issued2012
dc.description.abstractDesign, fabrication, and characterization of a high-performance micromachined lamellar-grating-interferometer-based Fourier transform spectrometer are presented. The device is designed to give high deflections with very low dynamic deformation and good mode separation. Mechanical self-stoppers are introduced to withstand accelerations larger than 500 g due to shock. The clear aperture area of the grating is about 10 mm(2). The maximum deflection while electrostatically actuated at ambient conditions is +/- 356 mu m at 71.2 V and 340 Hz, setting a record for comparable devices. At a pressure of 8.6 Pa, the same deflection is reached at 4.3 V. Six hundred eighty spectra per second can be recorded with a resolution of 14 cm(-1). With a HeNe laser at 633 nm, a spectral resolution of 0.54 nm (22 cm(-1)) is reached using electrostatic actuation. The microelectromechanical systems device is integrated into a compact Fourier transform spectrometer setup including a blackbody source, an infrared (IR) detector, and a visible laser using the device back side for reference. Early results with IR interferograms are also reported. In addition, the devices are actuated with pressure waves in the ambient air to reach deflections up to +/- 700 mu m. With this setup, the spectrum of a red laser is measured with a resolution of 0.3 nm (12.4 cm (1)).
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.issue2
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipMEMFIS
dc.description.sponsorshipEuropean Commission [224151]
dc.description.sponsorshipCMI This work was supported by the MEMFIS Project, supported by the European Commission Seventh Framework Program under Grant 224151. Subject Editor O. Solgaard.
dc.description.sponsorshipThe authors would like to thank all MEMFIS partners, particularly T. Sandner from the Fraunhofer Institute for Photonic Microsystems, A. PiotroWSKi from Vigo System, A. Kenda from Carinthian Tech Research, and S. Luttjohann from Bruker Optics for their contributions to the mechanical and optical designs. The microfabrication in this work was performed at the Center of Microtechnology (CMI), Ecole Polytechnique Federale de Lausanne (EPFL), Lausanne, Switzerland, with the support of the CMI staff. The authors would also like to thank P. Fluckiger and Y. Leblebici from EPFL, and E. Ermek, A. Mostafazadeh, and S. l er for the help with the laboratory work.
dc.description.volume21
dc.identifier.doi10.1109/JMEMS.2011.2180362
dc.identifier.eissn1941-0158
dc.identifier.issn1057-7157
dc.identifier.quartileQ2
dc.identifier.scopus2-s2.0-84859702657
dc.identifier.urihttps://doi.org/10.1109/JMEMS.2011.2180362
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7007
dc.identifier.wos302535800012
dc.keywordsFourier transform spectroscopy (FTS)
dc.keywordsinfrared (IR) spectroscopy
dc.keywordsinterferometer
dc.keywordslamellar grating
dc.keywordsmicrooptoelectromechanical systems
dc.keywordsNonlinear frequency-response
dc.keywordsComb
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofJournal of Microelectromechanical Systems
dc.subjectEngineering
dc.subjectElectrical and electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectInstruments and instrumentation
dc.subjectPhysics
dc.subjectApplied physics
dc.titleLamellar-grating-based mems fourier transform spectrometer
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorAyerden, Nadire Pelin
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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