Publication: Investigation of line edge roughness in current-controlled field-emission scanning probe lithography: image reversal vs. direct-write
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Program
Mechanical Engineering
KU-Authors
KU Authors
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Authors
Yazgı, Sertaç Güneri
Advisor
Alaca, Burhanettin Erdem
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Language
English
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Publisher:
Koç University
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Subject
Lithography, Nanolithography, Nanoimprint lithography, Litografi