Publication:
Two-wavelength grating interferometry for MEMS sensors

dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:35:50Z
dc.date.issued2007
dc.description.abstractDiffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. the two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.issue21-24
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume19
dc.identifier.doi10.1109/LPT.2007.908450
dc.identifier.eissn1941-0174
dc.identifier.issn1041-1135
dc.identifier.quartileQ3
dc.identifier.scopus2-s2.0-38049125816
dc.identifier.urihttps://doi.org/10.1109/LPT.2007.908450
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12558
dc.identifier.wos251701000065
dc.keywordsGrating interferometry
dc.keywordsMicro-electro-mechanical-systems (MEMS)
dc.keywordsOptical sensing
dc.keywordsTwo-wavelength interferometry
dc.language.isoeng
dc.publisherIEEE-inst Electrical Electronics Engineers inc
dc.relation.ispartofIEEE Photonics Technology Letters
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectOptics
dc.subjectPhysics, Applied physics
dc.titleTwo-wavelength grating interferometry for MEMS sensors
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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