Publication:
Two-wavelength grating interferometry for MEMS sensors

dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileFaculty Member
dc.contributor.yokid205198
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T23:35:50Z
dc.date.issued2007
dc.description.abstractDiffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. the two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.issue21-24
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.volume19
dc.identifier.doi10.1109/LPT.2007.908450
dc.identifier.eissn1941-0174
dc.identifier.issn1041-1135
dc.identifier.quartileQ3
dc.identifier.scopus2-s2.0-38049125816
dc.identifier.urihttp://dx.doi.org/10.1109/LPT.2007.908450
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12558
dc.identifier.wos251701000065
dc.keywordsGrating interferometry
dc.keywordsMicro-electro-mechanical-systems (MEMS)
dc.keywordsOptical sensing
dc.keywordsTwo-wavelength interferometry
dc.languageEnglish
dc.publisherIEEE-inst Electrical Electronics Engineers inc
dc.sourceIEEE Photonics Technology Letters
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectOptics
dc.subjectPhysics, Applied physics
dc.titleTwo-wavelength grating interferometry for MEMS sensors
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.authorid0000-0002-5381-533X
local.contributor.authorid0000-0003-0176-8807
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1Graduate School of Sciences and Engineering
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

Files