Publication: Two-wavelength grating interferometry for MEMS sensors
dc.contributor.department | Department of Electrical and Electronics Engineering | |
dc.contributor.department | Graduate School of Sciences and Engineering | |
dc.contributor.kuauthor | Ferhanoğlu, Onur | |
dc.contributor.kuauthor | Toy, Muhammed Fatih | |
dc.contributor.kuauthor | Ürey, Hakan | |
dc.contributor.schoolcollegeinstitute | College of Engineering | |
dc.contributor.schoolcollegeinstitute | GRADUATE SCHOOL OF SCIENCES AND ENGINEERING | |
dc.date.accessioned | 2024-11-09T23:35:50Z | |
dc.date.issued | 2007 | |
dc.description.abstract | Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. the two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity. | |
dc.description.indexedby | WOS | |
dc.description.indexedby | Scopus | |
dc.description.issue | 21-24 | |
dc.description.openaccess | NO | |
dc.description.publisherscope | International | |
dc.description.sponsoredbyTubitakEu | N/A | |
dc.description.volume | 19 | |
dc.identifier.doi | 10.1109/LPT.2007.908450 | |
dc.identifier.eissn | 1941-0174 | |
dc.identifier.issn | 1041-1135 | |
dc.identifier.quartile | Q3 | |
dc.identifier.scopus | 2-s2.0-38049125816 | |
dc.identifier.uri | https://doi.org/10.1109/LPT.2007.908450 | |
dc.identifier.uri | https://hdl.handle.net/20.500.14288/12558 | |
dc.identifier.wos | 251701000065 | |
dc.keywords | Grating interferometry | |
dc.keywords | Micro-electro-mechanical-systems (MEMS) | |
dc.keywords | Optical sensing | |
dc.keywords | Two-wavelength interferometry | |
dc.language.iso | eng | |
dc.publisher | IEEE-inst Electrical Electronics Engineers inc | |
dc.relation.ispartof | IEEE Photonics Technology Letters | |
dc.subject | Engineering | |
dc.subject | Electrical electronic engineering | |
dc.subject | Optics | |
dc.subject | Physics, Applied physics | |
dc.title | Two-wavelength grating interferometry for MEMS sensors | |
dc.type | Journal Article | |
dspace.entity.type | Publication | |
local.contributor.kuauthor | Ferhanoğlu, Onur | |
local.contributor.kuauthor | Toy, Muhammed Fatih | |
local.contributor.kuauthor | Ürey, Hakan | |
local.publication.orgunit1 | GRADUATE SCHOOL OF SCIENCES AND ENGINEERING | |
local.publication.orgunit1 | College of Engineering | |
local.publication.orgunit2 | Department of Electrical and Electronics Engineering | |
local.publication.orgunit2 | Graduate School of Sciences and Engineering | |
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