Publication:
MEMS FTIR spectrometer and optical results

Simple item page
dc.contributor.coauthorStehle, Jean-Louis
dc.contributor.coauthorHolmstrom, Sven
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:47:29Z
dc.date.issued2012
dc.description.abstractMEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
dc.description.indexedbyScopus
dc.description.indexedbyWOS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipnanoAlberta (Alberta Innovates Technology Futures)
dc.description.sponsorshipCMC Microsystems
dc.description.sponsorshipAlberta Cent. Adv. Micro Nano Technol. Prod. (ACAMP)
dc.description.sponsorshipBridger Photonics, Inc.
dc.identifier.doi10.1109/OMEMS.2012.6318837
dc.identifier.isbn9781-4577-1511-2
dc.identifier.issn2160-5033
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-84869200565
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2012.6318837
dc.identifier.urihttps://hdl.handle.net/20.500.14288/14134
dc.identifier.wos309942400061
dc.keywordsFourier transform spectroscopy
dc.keywordslamellar grating
dc.keywordsMEMS
dc.keywordsthin film thickness Acoustic actuations
dc.keywordsFourier transform spectroscopy
dc.keywordsFT-IR-spectrometers
dc.keywordsFTIR
dc.keywordsLamellar gratings
dc.keywordsOut-of-plane deflection
dc.keywordsMEMS
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsOptical systems
dc.keywordsOptimization
dc.keywordsThin films
dc.keywordsFilm thickness
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleMEMS FTIR spectrometer and optical results
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorAyerden, Nadire Pelin
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication3fc31c89-e803-4eb1-af6b-6258bc42c3d8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication434c9663-2b11-4e66-9399-c863e2ebae43
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

Files

Collections

Publications without Fulltext