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MEMS FTIR spectrometer and optical results

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dc.contributor.coauthorStehle, Jean-Louis
dc.contributor.coauthorHolmstrom, Sven
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileMaster Student
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:47:29Z
dc.date.issued2012
dc.description.abstractMEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
dc.description.indexedbyScopus
dc.description.indexedbyWoS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsorshipnanoAlberta (Alberta Innovates Technology Futures)
dc.description.sponsorshipCMC Microsystems
dc.description.sponsorshipAlberta Cent. Adv. Micro Nano Technol. Prod. (ACAMP)
dc.description.sponsorshipBridger Photonics, Inc.
dc.identifier.doi10.1109/OMEMS.2012.6318837
dc.identifier.isbn9781-4577-1511-2
dc.identifier.issn2160-5033
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84869200565anddoi=10.1109%2fOMEMS.2012.6318837andpartnerID=40andmd5=17f8033ae16982c034b3245fc8563770
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-84869200565
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2012.6318837
dc.identifier.urihttps://hdl.handle.net/20.500.14288/14134
dc.identifier.wos309942400061
dc.keywordsFourier transform spectroscopy
dc.keywordslamellar grating
dc.keywordsMEMS
dc.keywordsthin film thickness Acoustic actuations
dc.keywordsFourier transform spectroscopy
dc.keywordsFT-IR-spectrometers
dc.keywordsFTIR
dc.keywordsLamellar gratings
dc.keywordsOut-of-plane deflection
dc.keywordsMEMS
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsOptical systems
dc.keywordsOptimization
dc.keywordsThin films
dc.keywordsFilm thickness
dc.languageEnglish
dc.publisherIEEE
dc.sourceInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleMEMS FTIR spectrometer and optical results
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authorid0000-0001-7266-2124
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorAyerden, Nadire Pelin
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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