Publication: MEMS FTIR spectrometer and optical results
Program
KU-Authors
KU Authors
Co-Authors
Stehle, Jean-Louis
Holmstrom, Sven
Advisor
Publication Date
2012
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
Description
Source:
International Conference on Optical MEMS and Nanophotonics
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering