Publication: MEMS FTIR spectrometer and optical results
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Stehle, Jean-Louis
Holmstrom, Sven
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Abstract
MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
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Publisher
IEEE
Citation
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Source
International Conference on Optical MEMS and Nanophotonics
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DOI
10.1109/OMEMS.2012.6318837
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