Publication: MEMS FTIR spectrometer and optical results
Program
KU-Authors
KU Authors
Co-Authors
Stehle, Jean-Louis
Holmstrom, Sven
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
International Conference on Optical MEMS and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMEMS.2012.6318837