Publication:
MEMS FTIR spectrometer and optical results

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Stehle, Jean-Louis
Holmstrom, Sven

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Abstract

MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.

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IEEE

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Electrical electronics engineering

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International Conference on Optical MEMS and Nanophotonics

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DOI

10.1109/OMEMS.2012.6318837

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