Publication:
Two-wavelength grating interferometry for extended range MEMS metrology

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dc.conference.dateAUG 12-16, 2007
dc.conference.locationHualien, TAIWAN
dc.conference.organizerInstitute of Electrical and Electronics Engineers
dc.conference.organizerNational Science Council
dc.conference.organizerMinistry of Economic Affairs
dc.conference.organizerNational Tsing Hua University
dc.conference.organizerK-12 Education Center for Nanotechnology
dc.conference.organizerSino-American Silicon Products Inc.
dc.conference.organizerInstrumentation Technology Research Center, National Applied Research Laboratories
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T22:57:08Z
dc.date.issued2007
dc.description.abstractDiffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.1109/OMEMS.2007.4373857
dc.identifier.embargoN/A
dc.identifier.endpage96
dc.identifier.isbn9781424406418
dc.identifier.scopus2-s2.0-48049107498
dc.identifier.startpage95
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2007.4373857
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7498
dc.identifier.wos000251224200048
dc.keywordsOptical sensing
dc.keywordsGrating interferometry
dc.keywordsMEMS metrology
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartof2007 IEEE/Leos International Conference on Optical Mems and Nanophotonics
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectElectrical electronics engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.subjectSpectrum analysis
dc.titleTwo-wavelength grating interferometry for extended range MEMS metrology
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorÜrey, Hakan
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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