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Two-wavelength grating interferometry for extended range MEMS metrology

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileFaculty Member
dc.contributor.yokidN/A
dc.contributor.yokid205198
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T22:57:08Z
dc.date.issued2007
dc.description.abstractDiffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.identifier.doi10.1109/OMEMS.2007.4373857
dc.identifier.isbn978-1-4244-0641-8
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-48049107498
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2007.4373857
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7498
dc.identifier.wos251224200048
dc.keywordsOptical sensing
dc.keywordsGrating interferometry
dc.keywordsMEMS metrology
dc.languageEnglish
dc.publisherIEEE
dc.source2007 IEEE/Leos International Conference on Optical Mems and Nanophotonics
dc.subjectElectrical electronics engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.subjectSpectrum analysis
dc.titleTwo-wavelength grating interferometry for extended range MEMS metrology
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0003-0176-8807
local.contributor.authorid0000-0002-5381-533X
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1Graduate School of Sciences and Engineering
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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