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Two-wavelength grating interferometry for extended range MEMS metrology

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:57:08Z
dc.date.issued2007
dc.description.abstractDiffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1109/OMEMS.2007.4373857
dc.identifier.isbn978-1-4244-0641-8
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-48049107498
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2007.4373857
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7498
dc.identifier.wos251224200048
dc.keywordsOptical sensing
dc.keywordsGrating interferometry
dc.keywordsMEMS metrology
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2007 IEEE/Leos International Conference on Optical Mems and Nanophotonics
dc.subjectElectrical electronics engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.subjectSpectrum analysis
dc.titleTwo-wavelength grating interferometry for extended range MEMS metrology
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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