Publication: Two-wavelength grating interferometry for extended range MEMS metrology
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Abstract
Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. a two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.
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Institute of Electrical and Electronics Engineers
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2007 IEEE/Leos International Conference on Optical Mems and Nanophotonics
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10.1109/OMEMS.2007.4373857
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