Research Project: MEMFIS-Ultrasmall MEMS Fourier Transform InfraRed Spectrometer
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Contributors
Funders
ID
EC.00003
Authors
Ürey, Hakan
Faculty Member
Publications
Lamellar grating based MEMS fourier transform spectrometer
(Institute of Electrical and Electronics Engineers, 2010) Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Ürey, Hakan; Department of Electrical and Electronics Engineering; Yes; College of Engineering
A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
MEMS fourier transform spectrometer
(Institute of Electrical and Electronics Engineers, 2011) Ayerden, Nadire Pelin; Holmstrom, Sven; Seren, Hüseyin Rahmi; Ürey, Hakan; Department of Electrical and Electronics Engineering; Optical Microsystems Laboratory (MEMS); Yes; College of Engineering; Laboratory
A comb actuated lamellar grating interferometer based MEMS Fourier Transform Infrared (FTIR) Spectrometer device is designed, fabricated and characterized. The device operates at out-of-plane resonant mode which will allow ultra miniaturized, sensitive, robust, and fast spectrometers. As a novel approach pantograph type springs are used in the mechanical design to achieve high deflections. The dynamic deformation on the gratings is minimized using additional suspension springs. Optical simulations are conducted to extensively analyze the device performance in terms of spectral resolution and signal-to-bias ratio (SBR). In the light of simulations and experiments, the grating geometry is optimized for the region of wavelengths of interest (2.5-16 μm). Comb structures are designed and placed around pantograph springs for low voltage operation. The fabrication process is developed based on CMOS compatible bulk micromachining of a silicon-on-insulator wafer. A maximum peak to peak mechanical deflection of 478 μm is acquired with 50 V p-p input voltage in ambient pressure.
MEMS fourier transform IR spectrometer
(IEEE, 2011) Ayerden, Nadire Pelin; Holmstrom, Sven; Ölçer, Selim; Seren, Hüseyin Rahmi; Sharma, Jaibir; Ürey, Hakan; Sandner, Thilo; Luettjohann, Stephan; Department of Electrical and Electronics Engineering; Graduate School of Sciences and Engineering; Yes; College of Engineering; GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
Lamellar grating optimization for miniaturized fourier transform spectrometers
(Optical Society of America (OSA), 2009) Ferhanoğlu, Onur; Seren, Hüseyin Rahmi; Ürey, Hakan; Lüttjohann, Stephan; Department of Electrical and Electronics Engineering; Yes; College of Engineering
Microfabricated Lamellar grating interferometers (LGI) require fewer components compared to Michelson interferotemeters and offer compact and broadband Fourier transform spectrometers (FTS) with good spectral resolution, high speed and high efficiency. This study presents the fundamental equations that govern the performance and limitations of LGI based FTS systems. Simulations and experiments were conducted to demonstrate and explain the periodic nature of the interferogram envelope due to Talbot image formation. Simulations reveal that the grating period should be chosen large enough to avoid Talbot phase reversal at the expense of mixing of the diffraction orders at the detector. Optimal LGI grating period selection depends on a number of system parameters and requires compromises in spectral resolution and signal-to-bias ratio (SBR) of the interferogram within the spectral range of interest. New analytical equations are derived for spectral resolution and SBR of LGI based FTS systems. (C) 2009 Optical Society of America
High-speed broadband FTIR system using MEMS
(Optical Society of America, 2014) Ayerden, Nadire Pelin; Aygün, Uğur; Can, Başarbatu; Holmstrom, Sven; Ölçer, Selim; Ürey, Hakan; Stehle, Jean-Louis; Department of Electrical and Electronics Engineering; Yes; College of Engineering
Current Fourier transform infrared spectroscopy (FTIR) systems have very good spectral resolution, but are bulky, sensitive to vibrations, and slow. We developed a new FTIR system using a microelectromechanical system (MEMS)-based lamellar grating interferometer that is fast, compact, and achromatic (i.e., does not require a beam splitter). The MEMS device has > 10 mm(2) active surface area, up to +/- 325 mu m mechanical displacement, and a 343 Hz resonant operation frequency. The system uses a 5 MHz bandwidth custom infrared (IR) detector and a small emission area custom blackbody source to achieve fast interferogram acquisition and compact form factor. Effects of lamellar grating period, detector size, laser reference, apodization, and averaging of data on the spectral resolution are discussed. The measurement time ranges from 1.5 to 100 ms depending on the averaging time. In the target range of 2.5-16 mu m (625- 4000 cm(-1)) a spectral resolution of 15-20 cm(-1) is demonstrated. The measurements are shown to be stable over a long time. (C) 2014 Optical Society of America
