Publication: MOEMS thermal imaging camera
Program
KU Authors
Co-Authors
Torun, Hamdi
Degertekin, F. Levent
Advisor
Publication Date
2008
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
Description
Source:
Prime: 2008 Phd Research In Microelectronics And Electronics, Proceedings
Publisher:
Ieee
Keywords:
Subject
Computer science, Computer architecture, Civil engineering, Electrical electronics engineering, Telecommunication