Publication: MOEMS thermal imaging camera
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KU Authors
Co-Authors
Torun, Hamdi
Degertekin, F. Levent
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N/A
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Abstract
A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
Source
Publisher
Ieee
Subject
Computer science, Computer architecture, Civil engineering, Electrical electronics engineering, Telecommunication
Citation
Has Part
Source
Prime: 2008 Phd Research In Microelectronics And Electronics, Proceedings
Book Series Title
Edition
DOI
10.1109/RME.2008.4595735
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