Publication:
MOEMS thermal imaging camera

Placeholder

School / College / Institute

Organizational Unit

Program

KU Authors

Co-Authors

Torun, Hamdi
Degertekin, F. Levent

Publication Date

Language

Embargo Status

Journal Title

Journal ISSN

Volume Title

Alternative Title

Abstract

A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.

Source

Publisher

Ieee

Subject

Computer science, Computer architecture, Civil engineering, Electrical electronics engineering, Telecommunication

Citation

Has Part

Source

Prime: 2008 Phd Research In Microelectronics And Electronics, Proceedings

Book Series Title

Edition

DOI

10.1109/RME.2008.4595735

item.page.datauri

Link

Rights

Copyrights Note

Endorsement

Review

Supplemented By

Referenced By

0

Views

0

Downloads

View PlumX Details